Fast, Accurate & Reliable Ultra-pure Semiconductor Analytical Services

Ultisa Labs

01

Ultra-Low Level ICPMS

  • High-purity acids, solvents, and process chemicals
  • Sub-ppt detection limits for most semiconductor chemicals

02

ICPMS Nanoparticle Analysis

  • Sub-ppt metallic nanoparticle detection
  • <20 nm metallic nanoparticle size determination

03

VPD-ICPMS for Wafers & Substrates

  • Detects metallic contamination on wafer surfaces
  • <108 atoms per m2 detection limits

04

Clean bottles for sampling

  • On request, Ultisa will provide pre-cleaned and tested bottles for chemical sampling
  • Provided bottles are barcoded to ensure full sample process tracking

05

Bottle cleaning and verification

  • Precleaning and verification of customer chemical sampling bottles for use in processes

About Ultisa Labs

Ultisa utilizes decades of expertise in semiconductor analyses to detect and identify trace metal and nanoparticle contamination, in high purity chemicals, silicon wafers, and process tools.

Ultisa Labs specializes in analytical services for semiconductor applications and high-purity chemical manufacturers. Identification of impurities in semiconductor process chemicals and ultrapure water is vital to provide the data and information required to improve manufacturing processes and maximize product yield. Ultisa utilizes the most advanced automation to provide the quickest and most accurate analytical testing for the most critical applications. Ultisa technology and support provides rapid results for both routine and unique semiconductor applications, with flexibility to provide the fastest results and the capability to develop custom solutions for any process.

Why Semiconductor Leaders Trust Us

In semiconductor manufacturing, every atom matters. Yield, reliability, and performance depend on controlling contamination at the parts-per-trillion (ppt) level. Our laboratory specializes in ultra-low level metals analysis using ICPMS and Vapor Phase Decomposition (VPD) ICPMS to detect, quantify, and verify impurities across critical materials and wafer surfaces.

  • Sub-ppt detection limits for trace metals
  • Sub-ppt nanoparticle detection for semiconductor chemicals
  • VPD wafer surface analysis for contamination mapping
  • Ultra-high purity chemical testing (acids, solvents, bases)
  • Rapid turnaround to support fab qualification & process control
  • Completely automated analysis for the highest data reliability
  • Barcoded bottle sampling from start to finish for highest level of data security
prepFAST S Autobench

prepFAST S Autobench

Radian 7

Radian 7

Industries & Applications

Semiconductor

We provide comprehensive semiconductor analysis services tailored to support advanced logic, memory, and foundry fabs, delivering fast, accurate, and actionable results to meet the demanding quality standards of today’s semiconductor manufacturing.

Photovoltaics

Ultisa supports testing in the development and production of high-performance solar cells and advanced display technologies, helping to optimize materials, improve process control, and accelerate innovation in both energy and display applications.

Nanotechnology

Ultisa has the expertise accelerates innovation and quality control in fields including microelectronics, nanofabrication, and emerging semiconductor technologies, helping clients improve process yield, reliability, and device functionality.

High-Purity Chemicals

Utilizing ultra-trace detection methods and state-of-the-art instrumentation, we deliver advanced analytical solutions to ensure the highest standards of purity and quality in critical process chemicals used for semiconductor manufacturing.

Ultisa Capabilites and Packages

Ultisa offers a comprehensive range of capabilities and flexible laboratory testing packages designed to meet the diverse needs of the semiconductor industry. Whether clients require routine batch testing or specialized consulting and troubleshooting, our state-of-the-art labs provide comprehensive reports, fast turnaround, and expert support to optimize device performance and ensure product quality throughout the semiconductor lifecycle.

ICP-MS Total Metals Analysis Offerings

To make it simple for fabs, suppliers, and R&D teams to get the data they need, we offer a suite of semiconductor-grade ICP-MS trace metals analysis packages and detection limits. Each package is designed to match common industry requirements of critical contaminants such as Na, Mg, Al, Ca, K, Fe, and Zn. Whether you need specialized analysis for known problem elements or full-spectrum metals screening for process qualification, our packages provide the flexibility, sensitivity, and reliability your operation demands.

Analysis Grade Detection Limits
PPB Chemical
Clean Chemical
Ultrapure
PPQ Ultrapure
>1 ppb
<100 ppt
<10 ppt
<1 ppt
Metals Packages Elements Included
Basic Environmentals
(up to 18 metals)
Na, Mg, Al, K, Ca, Cr, Mn, Fe, Ni, Co, Zn, As, Sr, Ag, Cd, Sn, Ba, Pb
Semi Standard
(up to 41 metals)
Li, B, Na, Mg, Al, Si, K, Ca, Ti, V, Cr, Mn, Fe, Ni, Co, Zn, Ga, Ge, As, Rb, Sr, Zr, Nb, Mo, Ag, Cd, In, Sn, Sb, Cs, Ba, Hf, W, Ta, Ir, Au, Tl, Pb, Bi, Th, U
Full COA
(up to 69 metals)
Semi Standard Elements + P, Sc, Se, Y, Ru, Rh, Pd, Te, La, Ce, Pr, Nd, Pm, Sm, Eu, Gd, Tb, Dy, Ho, Er, Tm, Yb, Lu, Re, Os, Pt, Hg

Single Nanoparticle ICP-MS Packages

As device architectures shrink and material purity requirements tighten, detecting metals at the single nanoparticle level has become essential for advanced semiconductor manufacturing. Our single nanoparticle (spICP-MS) analysis packages provide unparalleled insight into both particle size distribution and sub-ppt particle concentrations.

Elements Minimum Detectable Particle Size (nm)
Al
Si
Ti
Cr
Fe
Ni
Cu
Zn
Ag
Sn
<10 nm
<100 nm
<10 nm
<10 nm
<10 nm
<15 nm
<10 nm
<15 nm
<10 nm
<10 nm
Minimum Detectable Concentration Packages Minimum Detectable Particle Concentration (particles/L)
Ultra Low
Low
Standard
<105
<107
<107

VPD-ICP-MS Packages

For the most sensitive wafer surface contamination studies, we provide a range of Vapor Phase Decomposition (VPD) ICPMS analysis packages tailored to semiconductor manufacturing needs. Whether you require a rapid contamination check for incoming wafers, an extended element panel for process troubleshooting, or a comprehensive full-spectrum analysis for supplier qualification, our VPD-ICPMS services give you the clarity and confidence to control yield-critical metals.

Scan Types include: Front Scan, Back Scan, Edge Scan

Metals Packages Elements Included
Basic Environmentals Na, Mg, Al, K, Ca, Cr, Mn, Fe, Ni, Co, Zn, As, Sr, Cd, Sn, Ag, Ba, Pb
Semi Standard Li, Na, Mg, Al, Si, K, Ca, Ti, V, Cr, Mn, Fe, Ni, Co, Zn, Ga, Ge, As, Rb, Sr, Zr, Nb, Mo, Ag, Cd, In, Sn, Sb, Cs, Ba, Hf, W, Ta, Tl, Pb, Bi, Th, U
Full COA Semi Standard Elements + B, P, Sc, Se, Y, Te, La, Ce, Pr, Nd, Pm, Sm, Eu, Gd, Tb, Dy, Ho, Er, Tm, Yb, Lu, Re, Hg

High-Purity Bottle Cleaning Services

Contamination control starts long before the sample reaches the instrument. Our laboratory offers specialized high-purity bottle cleaning services to ensure every container you use is free from trace metal residues and organic contaminants. We prepare bottles that meet the stringent requirements of semiconductor, pharmaceutical, and environmental testing labs. Whether for ultra-low level ICP-MS analysis, VPD wafer testing, or high-purity chemical storage, our cleaning service provides the confidence that your containers will never compromise your results.

Pre-cleaned Sample Bottles Available

On request Ultisa will provide precleaned and barcoded sampling bottles to ensure your testing needs are met without complications from contamination or mislabeling.

CONTACT US

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